Afanasyev Mikhail Sergeevich RussiaIRE im. V.A.Kotel'nikova RAN, 141120, g. Fryazino Moskovskoy oblasti, pl. Vvedenskogo 1старший научный сотрудникgvc@ms.ire.rssi.ru Author's articles Voltage-capacitance Characteristics of MIS-structures Based on Ferroelectric Films Calculation of Thermal Parameters and Technology of Formation MPL Microwave Range Determining Parameters of Planar Capacitors Based of Thin Film Ferroelectric Materials