Cite this article as:

Mitin D. M., Volkova N. V., German S. V., Markin A. V., Venig S. B., Serdobintsev A. A. Application of Thin Film Structures Based on Amorphous Silicon for pH Measurements in Solutions. Izvestiya of Saratov University. New series. Series Physics, 2016, vol. 16, iss. 1, pp. 24-26. DOI: https://doi.org/10.18500/1817-3020-2016-16-1-24-26

Heading: 
Physics
UDC: 
УДК 539.234
Language: 
Russian

Application of Thin Film Structures Based on Amorphous Silicon for pH Measurements in Solutions

Authors: 
Mitin Dmitry Michailovich, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, mitindm@mail.ru
Volkova Nadezhda Vladimirovna, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, nadyavolkova@bk.ru
German Sergey Viktorovich, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, german0709@rambler.ru
Markin Aleksey Viktorovich, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, av_markin@mail.ru
Venig Sergey Borisovich, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, sergey.venig@gmail.com
Serdobintsev Aleksey Aleksandrovich, Saratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83, alexas80@bk.ru
Abstract

Formation possibility of pH-sensor based on amorphous silicon thin films is shown. The principle of sensor operation is similar to the ionselective field effect transistor. Change of the investigated solution pH leads to change of depletion width and conductivity of amorphous silicon thin film structure.

Key words: 
amorphous silicon, thin films, pH-sensor, magnetron sputtering
DOI: 
https://doi.org/10.18500/1817-3020-2016-16-1-24-26
References

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