magnetron sputtering

Formation of Modified Materials in Flows of Low-temperature Plasma

Authors: Serdobintsev A. A., Venig S. B., Alexandrov V. A., Mitin D. M., Veselov A. G., Kiryasov O. A., Elmanov V. I.

In this paper the results of experimental studies are presented. The experiments were aimed to synthesis of materials with modified properties. A special technique of synthesis in low-temperature plasma flows allows controlling film material parameters. The possibility to control optical, morphological and electrophysical properties is shown by the examples of ZnO and Si films.

Application of Thin Film Structures Based on Amorphous Silicon for pH Measurements in Solutions

Authors: Mitin D. M., Volkova N. V., German S. V., Markin A. V., Venig S. B., Serdobintsev A. A.

Formation possibility of pH-sensor based on amorphous silicon thin films is shown. The principle of sensor operation is similar to the ionselective field effect transistor. Change of the investigated solution pH leads to change of depletion width and conductivity of amorphous silicon thin film structure.