Georgieva Anastasia Igorevna RussiaSaratovIRE im. V.A.Kotel'nikova RAN, 141120, g. Fryazino Moskovskoy oblasti, pl. Vvedenskogo 1инженерgvc@ms.ire.rssi.ru Author's articles Determining Parameters of Planar Capacitors Based of Thin Film Ferroelectric Materials