Yafarov Ravil' Kyashshafovich RussiaSaratovSaratov State University, 410012, Russia, Saratov, Astrakhanskaya street, 83профессорpirpc@yandex.ru Author's articles Nonequilibrium the Microwave Plasma of Low Pressure in Scientific Researches and Development Micro and Nanoelectronics Carbon Film Nanocomposite for High-Current Field Electron Sources Influence of Plasma-Chemical Modification of the Surface on Transverse Electron Transport and VAC of Silicon MIS Structures